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ATM to High-Vacuum Gauge - HPG400

Classification:
Product name:
ATM to High-Vacuum Gauge - HPG400

Order number:
See ordering information in Data Sheet

Shortdescription:
High Pressure Hot Ionization Pirani Gauge

Product types:
Pressure

Technology & Profiles:
PROFIBUS

Company:
INFICON AG

Alte Landstr. 6
9496 Balzers
Liechtenstein

Dipl. Ing. Rolf Enderes
Tel +423 388 3111
www.inficon.com
reach.liechtenstein(at)inficon(dot)com

Illustration:
Product description:

The INFICON High Pressure Hot Ionization Pirani Gauge, HPG400, combines High Pressure Hot Ionization and Pirani sensors in a single, compact, economical package to measure pressure from 2×10-6 mbar to atmosphere (1.5×10-6 Torr to atmosphere). The HPG400 provides highly repeatable and reproducible pressure measurement for accurate sputter process pressure control.

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